Welcome

Welcome

Welcome to the Joint EuroCVD 21 – Baltic ALD 15 Conference Linköping, Sweden, 11 – 14 June, 2017

 

Abstract submission is now open. Abstracts can be submitted by following the “Abstract Submission” link in the menu. Topics for this conference include:

 

  • Precursors (design, synthesis and delivery)
  • Modelling (surface, gas phase, thermo chemistry, quantum chemistry, multi scale)
  • Process Equipment (reactors)
  • Energy Enhanced processes (Plasma, Hot wire, Photon)
  • Nanomaterials (particles, 2D-materials, nano structures)
  • In-situ monitoring (QCM, Ellipsometry, IR, syncrotron)
  • Oxides (TCO, high-k, hard coatings, thermal barriers)
  • Nitrides (semiconductors, conductors, hard coatings)
  • Carbides (hard coatings, semiconductors)
  • Elemental films (metals, amorphous carbon)
  • Emerging materials (hybrid MLD/ALD, sulfides)

 

ABSTRACT SUBMISSION IS CLOSED

(>200 Abstracts are now in Review)

 

The meeting will be organized at the Konsert och Kongress venue in the heart of the city with walking distance to all hotels. Linköping is easily reached via direct flights from Amsterdam and Copenhagen, alternatively is Stockholm Arlanda airport just two hours by train.

 

Organizing Committee:

 

Henrik Pedersen, Linköping University, Chair

Jonas Sundqvist, BALD Engineering / Fraunhofer IKTS

Sean Barry, Carleton University

Mats Boman, Uppsala University

 

Sponsors

Platinum:

 

 

 

 

 

Gold:

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Silver:

 

 

 

 

 

 

 

 

Copper:

Contact

 

Henrik Pedersen

 

Postal address:

Linköpings Universitet

Henrik Pedersen

Department of Physics, Chemistry and Biology (IFM) / Chemistry (KEMI)

581 83 Linköping

Sweden

 

Email:

henrik.pedersen@liu.se

Phone: +46 13 281385

Mobile: +46 73 69 11 572

Twitter: @hacp81

Hash Tags for Twitter

#cvdald17

#EuroCVD

#BalticALD

Media support

Conference T-Shirt